論文使用權限 Thesis access permission:自定論文開放時間 user define
開放時間 Available:
校內 Campus: 已公開 available
校外 Off-campus: 已公開 available
論文名稱 Title |
電沉積法生長硒化銅銦鎵薄膜之研究 Study of CuIn1-xGaxSe2 Thin Film Prepared by Electrodeposition |
||
系所名稱 Department |
|||
畢業學年期 Year, semester |
語文別 Language |
||
學位類別 Degree |
頁數 Number of pages |
68 |
|
研究生 Author |
|||
指導教授 Advisor |
|||
召集委員 Convenor |
|||
口試委員 Advisory Committee |
|||
口試日期 Date of Exam |
2011-10-21 |
繳交日期 Date of Submission |
2011-11-18 |
關鍵字 Keywords |
鉬金屬、太陽能電池、硒化銅銦鎵薄膜、二硒化銅銦薄膜、電鍍 Solar cell, CuIn1-xGaxSe2 thin film, Mo metal, CuInSe2 thin film, Electrodeposition |
||
統計 Statistics |
本論文已被瀏覽 5684 次,被下載 407 次 The thesis/dissertation has been browsed 5684 times, has been downloaded 407 times. |
中文摘要 |
我們以電鍍的方式沉積 CuInSe2 和CuIn1-xGaxSe2 於雙層鉬金屬的基板上,我們使用RF 濺鍍沉積雙層鉬金屬在鈉玻璃基板。首先我們實驗濺鍍鉬金屬,並且討論鉬金屬的特性,如何可以同時得到好的附著力與低電阻的背電極雙層鉬金屬。接著,以電鍍方式沉積CuInSe2 和CuIn1-xGaxSe2 薄膜,我們分別針對電鍍時間、溶液酸鹼值、電鍍電流大小與電鍍溶液濃度,討論對CuInSe2 和CuIn1-xGaxSe2薄膜的影響。 |
Abstract |
We deposited CuInSe2 or CuIn1-xGaxSe2 on the substrate of bi-layer Mo by electrodeposition. Besides, we deposited bi-layer Mo by RF sputtering on soda-lime glass. First, we discussed the characteristic of Mo metal, and how can we have a good adhesion and a low resistivity simultaneously. Then, we deposited CuInSe2 and CuIn1-xGaxSe2 thin film by electrodeposition, and discussed the effect of depositing time, pH value in depositing solution, depositing current and different concentration ions respectively. |
目次 Table of Contents |
論文審定書.....................................................................................................................i Abstract (中).................................................................................................................ii Abstract (英)................................................................................................................iii Chapter 1 Introduction ………………………….……………………………………………1 1-1 Energy..............................................................................................................1 1-2 The theroy of solar cell....................................................................................3 1-2.1 The Solar Spectrum..............................................................................3 1-2.2 The theroy of operating solar cell.........................................................5 1-3 Solar cell..........................................................................................................8 1-4 CuInSe2 solar cell...........................................................................................11 1-4.1 The structure of CuInSe2 solar cell.....................................................11 1-4.2 Preparation of CuIn1-xGaxSe2 solar cell..............................................26 1-5 The theroy of electrodeposition.....................................................................29 1-5.1 The setup of electrodeposition…………………….………………30 1-6 Motivationv....................................................................................................31 Chapter 2 Experiment…………………………………………………………………………33 2-1 Preparation of soda-lime glass.......................................................................33 2-2 Mo contact by RF sputtering..........................................................................33 2-2.1 Preparation of Mo contact...................................................................33 2-2.2 Sputtering mechanism.........................................................................34 2-2.3 System of RF sputtering......................................................................35 2-3 Preparation of electrodeposited CuInSe2 and CuIn1-xGaxSe2 solution…...…37 2-3.1 Parameters of electrodeposited solution ............................................38 2-3.2 Setup of electrodeposition...................................................................39 2-4 Physical and chemical properties...................................................................41 Chapter 3 Result and Discussion …………………………………..…………………………42 3-1 Preparation of Bi-layer Mo…………………………………………………42 3-2 Effect of deposited current to thin film in solution........................................48 3-3 Effect of deposited time to thin film in solution............................................49 3-4 Effect of pH value to thin film in solution.....................................................50 3-5 Effect of ion concentration to thin film in solution........................................51 Chapter 4 Conclusion...................................................................................................................53 Reference……………………………………………………………………………54 |
參考文獻 References |
[1] Werman Advisory Council on Global Change (WBGU). [2] D. Lidgate, “Green Energy?,” Engineering Science and Education Journal, Vol.1, No.5, pp. 221-227,1992. [3] Jack L. Stone, “Photovoltaics: Unlimited Electrical Energy from the Sun,” Physics Today, Vol. 46, Issue 9, pp.22, 1993. [4] Adams, W.G. and R.E. Day, Proc. R. Soc., A25: pp.113, 1877. [5] Jenny Nelson., The Physics Of Solar Cells, Landon, Imperial College Press, 2003. [6] S.O. Kasap, Optoelectronics and Photonics: Principles and Practices, New Jersey, Prentice Hall, 2001. [7] 莊嘉琛,太陽能工程-太陽電池篇,全華科技圖書股份有限公司,台北,1997。 [8] ZSW press release 11/2010, Stuttgart, July 27th, 2010. [9] Lawrence Kazmerski, National Renewable Energy Laboratory (NREL), March 2011. [10] J. Hedstrom, H. Ohlsen, M. Bodegard, A. Kylner, L. Stolt, D. Hariskos, M. Ruckh and H. W. Schock, ”ZnO/CdS/Cu(In,Ga)Se2 thin film solar cells with improved performance,” Proc. 23th IEEE Photovoltaic Specialist Conf., p. 364, 1993. [11] H. Ruckh, D. Schmid, M. Kaiser, R. Schaffler, T. Walter and H. W. Schock, “Progress in Polycrystalline Thin-Film Cu(In,Ga)Se2 Solar Cells”, Proceedings of the First WCPEC, p. 156, 1994. [12] M. Ruckh, et al., Precursor for Semiconductor Thin Films and Method for Producing Semiconductor Thin Films, First WCPEC, pp.156-159, 1994. [13] R.C. Valderrama, M. Miranda-Hernàndez, P.J. Sebastian, and A.L. Ocampo, “Electrodeposition of indium onto Mo/Cu for the deposition of Cu(In,Ga)Se2 thin films,” Electrochimica Acta, vol. 53, pp. 3714-3721, 2008. [14] 張瑋恩,黃家華,硒化銅銦鎵太陽能電池電極層之特性分析,國立東華大學碩士論文,2006。 [15] John H. Scofield,A. Duda, D. Albin, B.L. Ballard, P.K. Predecki, Thin Solid Films, Vol.260, pp.26-31, 1995. [16] Eigo Takahashi, Shirish A. Pethe, and Neelkanth G. Dhere, “CORRELATION BETWEEN PREPARATION PARAMETERS AND PROPERTIES OF MOLYBDENUM BACK CONTACT LAYER FOR CIGS THIN FILM SOLAR CELL,” IEEE, 2010. [17] Springer, Berlin, Handbook of electronic and photonic, p.19, 2006. [18] K.H. Muiler, “Stress and microstructure of sputter-deposited thin films: Molecular dynamics investigations, “ Journal of Applied Physics, vol. 6 2, pp. 1796-1799, 1987. [19] J.L.Shsy,J.H.Wernick, “Ternary Chalcopyrite Semiconductors: Growth, Electronic Properties, and Application”, Pergamon Press, New York, 1975. [20] F. Basolo and R. C. Johnson, “Coordination Chemistry”, Benjamin/Cummings Pub. Co., Menlo Park, CA 1st ed., p.114, 1964. [21] O. Lundberg, J. Lu, A. Rockett, M. Edoff, L. Stolt, “Diffusion of indium and gallium in Cu(In,Ga)Se2 thin film solar cells”, Journal of Physics and Chemistry of Solids, Vol. 64, Issues 9-10, pp. 1499-1504, 2003. [22] F.Abou-Elfotouh, D.J.Dunlavy, T.J.Coutts, Solar Cell, 27,1989. [23] J. Herrero, “Recrystallization and components redistribution processes in electrodeposited CuInSe2 thin films”, Thin Solid Films, 387, pp.57-59, 2001. [24] P. J. Sebastian, E. Calixto and A. Fernandez, “ Electro/electroless deposition and characterization of Cu-In precursors for CIS (CuInSe2) films”, Journal of Crystal Growth, 169, pp.287-292, 1996. [25] R. Woodyard and G. A. Candies, “Radiation resistance of thin-film solar cells for space photovoltaic power”, Solar Cells, 31, pp.297-329, 1991. [26] Moller, H. J., Semiconductors for Solar Cells, 1993. [27] T. Nakada and M. Mizutani. Jpn. J. Appl. Phys. Part 2-Lett., 41, p. 165, 2002. [28] D. Hariskos, S. Spiering, M. Powalla, “Buffer layers in Cu(In,Ga)Se2 solar cells and modules”, Thin Solid Films, 480–481, 99-109, 2005. [29] Minoru Yoneta, Masakazu Ohishi, Hiroshi Saito and Tetsuya Hamasaki, “Low temperature molecular beam epitaxial growth of ZnS/GaAs(001) by using elemental sulfur source”, Journal of Crystal Growth 127, pp. 314-317, 1993. [30] V. Dimitrova, J. Tate, “Synthesis and characterization of some ZnS-based thin film phosphors for electroluminescent device applications”, Thin Solid Films, Vol. 365, pp. 134-138, 2000. [31] A.N. Yazici, M. Oztas, M. Bedr, “Effect of sample producing conditions on the thermoluminescence properties of ZnS thin films developed by spray pyrolysis method”, J. Lumin. Vol. 104, pp. 115-122, 2003. [32] L.X. Shao, K.H. Chang, H.L. Hwang, “Zinc sulfide thin films deposited by RF reactive sputtering for photovoltaic applications”, Appl. Surf. Sci. vol. 305, pp. 212–213, 2003. [33] T. Nakada, M. Mizutani, Y. Hagiwara, A. Kunioka, “High-efficiency Cu(In,Ga)Se2 thin-film solar cells with a CBD-ZnS buffer layer”, Solar Energy Mater. Solar Cells, vol. 67, pp. 255-260, 2001. [34] Fei Long , Wei-Min Wang, Zhan-kui Cui, Li-Zhen Fan, Zheng-guang Zou, Tie-kun Jia, “An improved method for chemical bath deposition of ZnS thin films”, Chemical Physics Letters, 462 (2008) 84–87 [35] Li Y, Tompa GS, Liang S, Gorla C, Lu Y, Doyle J. “Transparent and conductive Ga-doped ZnO films grown by low pressure metal organic chemical vapor deposition”, J Vac Sci Technol A, vol. 15, pp. 1063-1068, 1997. [36] B. Rech, H. Wagner, Appl. Phys. A, Mater. Sci. Proces, vol. 69, pp. 155, 1999. [37] Zhu H, Bunte E, Hüpkes J, Siekmann H, Huang SM. In: Proceedings of the 7th ICCG conference (international conference on coatings and on glass and plastics proceedings), Eindhoven/Veldhoven, pp. S.343–7, 2008. [38] Berginski Michael, Hüpkes Jürgen, Schulte Melanie, Schöpe Gunnar, Stiebig Helmut, Rech Bernd, et al. “The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells”, J Appl Phys, 101, 074903, 2007. [39] Ingrid Repins, Miguel A. Contreras, Brian Egaas, Clay, DeHart, John Scharf, Craig L. Perkins, Bobby To, and Rommel Noufi, “19.9%-efficient ZnO/CdS/CuInGaSe2 Solar Cell with 81.2% Fill Factor”, Prog. Photovolt: Res. Appl. 16 235, 2008. [40] Coutts TJ, Young DL, Li X, Mulligan WP, Wu X. “Search for improved transparent conducting oxides: A fundamental investigation of CdO, Cd2SnO4, and Zn2SnO4”, J Vac Sci Technol A, 18:2646-60, 2000. [41] K. L. Chopra, S. Major, and D. K. Pandya, “Transparent conductors--a status review,” Thin Solid Films, 102, 1-46, 1983. [42] Grill Alfred, “Cold plasma in materials fabrication”. New York: IEEE Press, 1994. [43] Gorjanc TC, Leong D, Py C, Roth D. “Room temperature deposition of ITO using r.f. magnetron sputtering”, Thin Solid Films, vol. 413, pp. 181–185, 2002. [44] R. A. Mickelsen and M. S. Chen, “High photocurrent polycrystalline thin‐film CdS/CuInSe2 solar cell”, Appl. Phys. Lett., 26, 5, 1980. [45] S. P. Grindle, A. H. Clark, S. Rezaie-Serej, J. Mcneily, L. L. Mcneily, “Growth of CuInSe2 by molecular beam epitaxy”, Journal of Applied Physics, 51, 10, 1980. [46] N. Romeo, V. Canevari, G. Sberveglieri, A. Bosio, “Growth of Large-Grain CuInSe2 Thin Films by Flash-Evaporation and Sputtering.” Solar Cells, 16, pp.155-164, 1986. [47] B. Pamplin and R.S. Feigelson. This Solid Films, vol. 60, p. 144, 1979. [48] D. Pottier and G. Maurin, “Preparation of polycrystalline thin films of CuInSe2 by electrodeposition”, J. Appl. Electrochem., vol. 19, pp. 361-367, 1989. [49] R. K. Pandey, S. N. Sahu and S. Chandra, Handbook of Semiconductor Electrodeposition, Marcel Dekker, Inc., New York, pp. 247, 1996. [50] I. Repins, M.A. Contreras, B. Egaas, C. DeHart, J. Scharf, C.L. Perkins, B. To, and R.N. Noufi, Prog. Photovolt: Res. Appl., vol. 16, pp. 235-239, 2008. [51] 行政院國家科學委員會精密儀器發展中心。真空技術與應用。臺灣新竹:國科會精儀中心。2001。 [52] R.N. Bhattacharya, J.F. Hiltner, W. Batchelor, M.A. Contreras, R.N. Noufi, and J.R. Sites, “Effects of sodium sulfamate on electrodeposition of Cu(In,Ga)Se2 thin film”, Thin Solid Films, vol. 361-362, pp.396-399, 2000. [53] 尤光先,電鍍工程學,徐氏基金會出版, p. 1-5, 1976. [54] Raghu N. Bhattacharya, A.M.F., “CuIn1-xGaxSe2-based photovoltaic cells from electrodeposited precursor films”, Solar Energy Materials & Solar Cells, 76: p. 331-337, 2003. [55] 李俊賢,CuInSe2:Sb薄膜太陽能電池之研製,國立中山大學材料科學研究所碩士論文,2004. [56] 黃家華,張瑋恩,硒化銅銦鎵太陽能電池電極層之特性分析(Characterization of Electrodes for Cu(In,Ga)Se2-based solar cells),國立東華大學碩士論文,2009. [57] R.N. Bhattacharya, W. Batchelor, J.E. Granata, F. Hasofon, H. Wiesner, K. Ramanathan, J. Keane, R.N. Noufi, Solar Energy Materials and Solar Cells 55 (1998) 83-94 [58] 張智閔,Ternary CIS based solar cell devices fabricated by electrodeposition,2007 [59] M. Hermanna,* ,C. Gonzalez a,c,Solar Energy Material & Solar Cells 70(2001) 345-36 [60] P.J. Sebastian*, M.E.C., R.N. Bhattacharya, Rommel Noufi, CIS and CIGS based photovoltaic structures developed from electrodeposited precursors. Solar Energy Materials & Solar Cells, 1999. 59: p. 125-135. |
電子全文 Fulltext |
本電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。 論文使用權限 Thesis access permission:自定論文開放時間 user define 開放時間 Available: 校內 Campus: 已公開 available 校外 Off-campus: 已公開 available |
紙本論文 Printed copies |
紙本論文的公開資訊在102學年度以後相對較為完整。如果需要查詢101學年度以前的紙本論文公開資訊,請聯繫圖資處紙本論文服務櫃台。如有不便之處敬請見諒。 開放時間 available 已公開 available |
QR Code |